WebThe High-Speed SECS Message Services (HSMS) protocol is a standard transport protocol for communication between production equipment and factory control systems in semiconductor factories.HSMS defines a TCP/IP based Ethernet connection and is intended as a high speed alternative to the serial (RS-232 based) SECS-I protocol. HSMS is defined … WebLine Item Revision to SEMI E37-1018: Specification for High Speed Secs Message Services (HSMS) Generic Services and SEMI E37.1-0819: Specification for High-Speed Secs Message Service Single Selected-Session Mode (HSMS-SS) 6598B LI-1. Line Item Title: Clarify T8. Failed.
E03000 - SEMI E30 - Specification for the Generic Model for ...
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SEMI E37 : 2013 HIGH-SPEED SECS MESSAGE SERVICES (HSMS) …
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